INDUSTRIAL Arc BASED EQUIPMENT FOR DECORATIVE COATING DEPOSITION

K. Marszałek, E. Leja

Academy of Mining and Metallurgy, Al. Mickiewicza 30, 30-059 Krakow, Poland


This paper presents industrial arc based equipment for deposition of metallic or nitride coatings on the glass surface. The large size vacuum chamber (volume about 4 m3) with the sample holder is demonstrated. Pumping system consists of two rotary pumps BL90, the Roots pump WK4000 and the oil diffusion pump PDO 16 000. The arc source with Ti cathode of 180 cm length and electromechanical arc starter were used for coating deposition. The process is fully automated. The substrates are cleaned by means of ultrasound cleaning method in the four-step procedure.