DEEP ION IMPLANTATION: ADVANTAGES AND CURRENT PROBLEMS

B. Slowiński

Institute of Physics, Warsaw University of Technology, 75 Koszykowa Str., 00-662 Warsaw, Poland and Institute of Atomic Energy, 05-400 Swierk/Otwock, Poland


The advantages of swift heavy ions (~1 MeV/u) application for analysis and treating of solids in order to modify their properties are briefly summarised. As an illustration some examples of this application are also quoted.