WURTZITE InP PHASE FORMATION DURING SWIFT Xe ION IRRADIATION

P. I. Gaiduk1, F. F. Komarov1, V. S. Tishkov1, O. Herre2, E. Wendler2, W. Wesch2

1 Belorussian State University, Kurchatova 7, 220064 Minsk, Belorussia,
2 Friedrich-Schiller-Universitaet Jena, Institut fur Festkorperphysik, Max-Wien-Platz 1, D-07743 Jena, Germany


Ion beam-induced amorphization and crystallization in InP implanted at room temperature with swift (250 and 340 MeV) Xe+ ions to doses of 5x1013 and 1x1014 cm-2, respectively, are investigated by the transmission electron microscopy. For the ion fluences above 5x1013 cm-2 the formation of amorphous InP of two different atomic structures is registered after swift Xe ion implantation as a consequence of electron and nuclear energy deposition. In the case of the highest ion dose implanted (1x1014cm-2) a partial crystallization of the amorphous surface layer to polycrystalline InP is observed. The crystallization process passes a stage of wurtzite InP phase formation which is found to be metastable.