SIMS STUDY OF LOW ENERGY IMPLANTATION

J. Hereæ, J. Filiks, J. Sielanko

Institute of Physics, Maria Curie-Sklodowska University, Pl. M. Curie-Sklodowskiej 1, 20-031 Lublin, Poland


The paper presents the results of direct, low energy implantation investigations, using the SIMS apparatus. The retained dose for the Cu and Ag samples as a function of irradiation dose of the Cs+ and K+ ions, as a primary beam was measured. From such relation the range profiles of implanted ions were calculated. The comparisons with the results of the computer simulation and analytical theory are also presented.